Partly Pd-covered nonevaporable getter films

Nonevaporable getter films partly covered with Pd were fabricated as a means of allowing the adsorption of a variety of gases by such films. Both Pd and the getter material are present on the film surface and the former adsorb H2 and CO while the latter additionally adsorb CO2 and CO. Zr films partly covered with Pd were found to pump gaseous H2, CO, and CO2 following activation at 80 °C for 24 h. In addition, the pumping rates of such films did not degrade even after repeated exposure to ambient air and heating.