PEALD WSe2 Supplemental Online Material

additional characterization details and characterization for PEALD WSe2 thin films deposited at 300 C and 400 C

Authors

Publication Details

Journal
AIP Publishing
Published
2026-11-02
DOI
https://doi.org/10.60893/figshare.jva.34442076
Primary Topic
2D Materials and Applications
Type
article
Field-Weighted Citation Impact
0.00
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article

PEALD WSe2 Supplemental Online Material

Rebecca Dawley, Gia Rivers, Ageeth Bol
AIP Publishing
2D Materials and Applications
article

PEALD WSe2 Supplemental Online Material

Rebecca Dawley, Gia Rivers, Ageeth Bol
article en

Abstract

additional characterization details and characterization for PEALD WSe2 thin films deposited at 300 C and 400 C

AIP Publishing
Openalex Percentile: Top 31%
2D Materials and Applications
DOIOpen Access PDFOpenAlex
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PEALD WSe2 Supplemental Online Material — Rebecca Dawley, Gia Rivers, et al. · AIP Publishing (2026) | TGRS Research Map | TGRS