STRUCTURAL PROPERTIES OF In2O3 AND SnO2 FILMS OBTAINED BY MAGNETRON SPUTTERING

Wide-bandgap In2O3 and SnO2 oxide films were fabricated singmagnetron sputtering in an argon atmosphere. In2O3 (indium oxide) and SnO2 (tin oxide) films deposited on glass and silicon substrates were investigated. The atomic composition of tin in the doped oxide layer—specifically, indium tin oxide (ITO)—was determined. The electrical resistivity and carrier mobility values for the ITO films were measured. The structure of the oxides was analyzed via X-ray diffraction, and their structural properties were examined using a scanning electron microscope.

Authors

Publication Details

Journal
Zenodo (CERN European Organization for Nuclear Research)
Published
2026-11-01
DOI
https://doi.org/10.5281/zenodo.23860767
Primary Topic
ZnO doping and properties
Type
article
Field-Weighted Citation Impact
0.00
Controls
|||
ALL TIME
JAN
FEB
MAR
APR
MAY
JUN
JUL
AUG
SEP
OCT
article

STRUCTURAL PROPERTIES OF In2O3 AND SnO2 FILMS OBTAINED BY MAGNETRON SPUTTERING

Nurmatova Sevara, Abrorjon Yuldashev, Sultanpasha Muzafarova
Zenodo (CERN European Organization for Nuclear Research)
ZnO doping and properties
article

STRUCTURAL PROPERTIES OF In2O3 AND SnO2 FILMS OBTAINED BY MAGNETRON SPUTTERING

Nurmatova Sevara, Abrorjon Yuldashev, Sultanpasha Muzafarova
article en

Abstract

Wide-bandgap In2O3 and SnO2 oxide films were fabricated singmagnetron sputtering in an argon atmosphere. In2O3 (indium oxide) and SnO2 (tin oxide) films deposited on glass and silicon substrates were investigated. The atomic composition of tin in the doped oxide layer—specifically, indium tin oxide (ITO)—was determined. The electrical resistivity and carrier mobility values for the ITO films were measured. The structure of the oxides was analyzed via X-ray diffraction, and their structural properties were examined using a scanning electron microscope.

Zenodo (CERN European Organization for Nuclear Research)
Openalex Percentile: Top 29%
ZnO doping and properties
DOIOpen Access PDFOpenAlex
AI Navigator

Ask Laika to Summarize, Analyze, and Connect papers live on the map.

Summarize Papers & Methodologies

Extract key findings, datasets, and comparative methods across publications.

Benchmark Rankings & Visual Analytics

Rank top research institutions, authors, funders, topics, and journals by Field-Weighted Citation Impact (FWCI) and paper volume with instant charts.

Connect Distant Disciplines

Bridge topological clusters on the map to find hidden collaborative intersections.

Laika access coming soon
STRUCTURAL PROPERTIES OF In2O3 AND SnO2 FILMS OBTAINED BY MAGNETRON SPUTTERING — Nurmatova Sevara, Abrorjon Yuldashev, et al. · Zenodo (CERN European Organization for Nuclear Research) (2026) | TGRS Research Map | TGRS