In Situ Visualization of Marangoni Convection in the Meniscus during Rotagoni Drying

The phenomena of flow velocity and flow pattern in the meniscus region due to the IPA vapor effect were experimentally investigated by Stereoscopic Particle Image Velocimetry (Stereo PIV) analysis using an experimental apparatus simulating the Rotagoni drying function. Unlike nitrogen gas supply, IPA vapor gas generates Marangoni liquid flow in the meniscus region, and the direction of this liquid flow is the same as the centrifugal force direction due to rotation, which is also the direction of liquid discharge from the wafer surface.

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Publication Details

Journal
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
Published
2026-10-29
DOI
https://doi.org/10.4028/p-jza1hr
Primary Topic
Fluid Dynamics and Thin Films
Type
article
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article

In Situ Visualization of Marangoni Convection in the Meniscus during Rotagoni Drying

Tomoatsu Ishibashi, Naoki Ono
1 links
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
Fluid Dynamics and Thin Films
article

In Situ Visualization of Marangoni Convection in the Meniscus during Rotagoni Drying

Tomoatsu Ishibashi, Naoki Ono
article en

Abstract

The phenomena of flow velocity and flow pattern in the meniscus region due to the IPA vapor effect were experimentally investigated by Stereoscopic Particle Image Velocimetry (Stereo PIV) analysis using an experimental apparatus simulating the Rotagoni drying function. Unlike nitrogen gas supply, IPA vapor gas generates Marangoni liquid flow in the meniscus region, and the direction of this liquid flow is the same as the centrifugal force direction due to rotation, which is also the direction of liquid discharge from the wafer surface.

Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomenaVol. 395
Shibaura Institute of Technology (JP), Ebara (Japan) (JP)
Openalex Percentile: Top 19%
Fluid Dynamics and Thin Films
DOISourceOpenAlex
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