Design and Analysis of 2-DOF Flexure Based Micromanipulator with Bridge Type Amplifier

A new compliant parallel micromanipulator (CPM) with two degrees of freedom (2-DOF) and flexure joints with bridge-type displacement amplifier are proposed to micromanipulate. It is based on 2-DOF translational and amplification mechanism which adopts the flexure hinge to replace the traditional hinge. This monolithic mechanism provides 2 translational axes and having high frequency. Because of being precise in deformation, circular flexure hinges are adopted in the mechanism. FEA model is developed to perform to analysis and predict the behavior of this mechanism. In this way, computational Jacobian, workspace and amplification ratios are derived. The calculation of safety factor is used to explore the stress-strain relationship. Further, the output displacements, such as, equivalent stress, are computed on the input displacements of the different flexure radius and shapes. Geometrical modelling is determined. Result shows that compliant parallel micromanipulator’s workspace is obtained ±191.81 μm ×±192.41 μm. Analytically and computationally amplification ratios are 6.77 and 6.19 respectively. Natural frequency was found 2134 Hz and validated by analytically. This is a 2-DOF mechanism that reduces parasitic motion. Designing it is easy. Stiffness in output and output displacement are good.