Marangoni Flow and Dewetting of Thin Liquid Films on Wafer Surface
In this paper we derive the equations for the evolution of a thin liquid film on a flat surface subject to Marangoni flow due to a temperature gradient, with simple repeating boundary conditions and more realistic contact line boundary conditions. Dimensional analysis shows a characteristic time scale and relative scaling of terms in the equation. Solutions to the equation and time until dewetting occurs are shown for both 1D and 2D domains. Parameter variation shows how dewetting time changes based on changes in film height, temperature gradient, and liquid composition.
Authors
- Derek W. Bassett (ORCID: https://orcid.org/0000-0002-9452-2322)
Institutions
- Tokyo Electron (Japan) (JP)
Publication Details
- Journal
- Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
- Published
- 2026-10-29
- DOI
- https://doi.org/10.4028/p-vll2ye
- Primary Topic
- Fluid Dynamics and Thin Films
- Type
- article
- Field-Weighted Citation Impact
- 0.00