Marangoni Flow and Dewetting of Thin Liquid Films on Wafer Surface

In this paper we derive the equations for the evolution of a thin liquid film on a flat surface subject to Marangoni flow due to a temperature gradient, with simple repeating boundary conditions and more realistic contact line boundary conditions. Dimensional analysis shows a characteristic time scale and relative scaling of terms in the equation. Solutions to the equation and time until dewetting occurs are shown for both 1D and 2D domains. Parameter variation shows how dewetting time changes based on changes in film height, temperature gradient, and liquid composition.

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Publication Details

Journal
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
Published
2026-10-29
DOI
https://doi.org/10.4028/p-vll2ye
Primary Topic
Fluid Dynamics and Thin Films
Type
article
Field-Weighted Citation Impact
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article

Marangoni Flow and Dewetting of Thin Liquid Films on Wafer Surface

Derek W. Bassett
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
Fluid Dynamics and Thin Films
article

Marangoni Flow and Dewetting of Thin Liquid Films on Wafer Surface

Derek W. Bassett
article en

Abstract

In this paper we derive the equations for the evolution of a thin liquid film on a flat surface subject to Marangoni flow due to a temperature gradient, with simple repeating boundary conditions and more realistic contact line boundary conditions. Dimensional analysis shows a characteristic time scale and relative scaling of terms in the equation. Solutions to the equation and time until dewetting occurs are shown for both 1D and 2D domains. Parameter variation shows how dewetting time changes based on changes in film height, temperature gradient, and liquid composition.

Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomenaVol. 395
Tokyo Electron (Japan) (JP)
Openalex Percentile: Top 20%
Fluid Dynamics and Thin Films
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