A Review of Development History and Recent Advances in Inchworm Piezoelectric Motor-Related Modelings

Different types of piezoelectric actuators and motors have attracted a great deal of modeling research in applications, with varying types and complexity. This paper specifically summarizes the modelings related to the inchworm piezoelectric motor to clarify the development achievements. It reviews the progress of dynamics models and characteristics models, classifying them by model features and abilities through development history. Finally, conclusions for existing research and possible future fields have been proposed.