Zero-Shot Multi-Class Wafer Map Classification with Rule-Ordered Prompts for Large Multimodal Models

Wafer-map defect classification often requires labeled data and retraining when production conditions change. We present a training-free six-class framework that combines connected-component highlighting with morphology-, location-, and exclusion-aware prompts for a frozen large multimodal model. On Mixed-WM38 (6,866 maps), multi-region prompting achieves 92.9% macro and 93.8% overall accuracy. On WM811K (9,000 maps), it achieves 79.1% and 81.3%, respectively. Eight alternative rule orders achieve 90.1-91.9% overall accuracy, compared with 93.8% for the selected order.

Authors

Publication Details

Journal
arXiv (Cornell University)
Published
2026-10-26
DOI
https://doi.org/10.48550/arxiv.2610.35080
Primary Topic
Industrial Vision Systems and Defect Detection
Type
preprint
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preprint

Zero-Shot Multi-Class Wafer Map Classification with Rule-Ordered Prompts for Large Multimodal Models

Tianjian Cao, Jun Tao
arXiv (Cornell University)
Industrial Vision Systems and Defect Detection
preprint

Zero-Shot Multi-Class Wafer Map Classification with Rule-Ordered Prompts for Large Multimodal Models

Tianjian Cao, Jun Tao
preprint en

Abstract

Wafer-map defect classification often requires labeled data and retraining when production conditions change. We present a training-free six-class framework that combines connected-component highlighting with morphology-, location-, and exclusion-aware prompts for a frozen large multimodal model. On Mixed-WM38 (6,866 maps), multi-region prompting achieves 92.9% macro and 93.8% overall accuracy. On WM811K (9,000 maps), it achieves 79.1% and 81.3%, respectively. Eight alternative rule orders achieve 90.1-91.9% overall accuracy, compared with 93.8% for the selected order.

arXiv (Cornell University)
Industrial Vision Systems and Defect Detection
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Zero-Shot Multi-Class Wafer Map Classification with Rule-Ordered Prompts for Large Multimodal Models — Tianjian Cao, Jun Tao · arXiv (Cornell University) (2026) | TGRS Research Map | TGRS