Asymmetric interfacial reaction governed by twin orientation in hybrid nanotwinned copper interconnects

The asymmetric interfacial reaction in (111) nanotwinned Cu (nt-Cu)/Sn/(110) nt-Cu interconnects was investigated using in-situ synchrotron radiation imaging and electron backscatter diffraction (EBSD). Real-time imaging reveals that the growth rate of interfacial intermetallic compounds (IMCs) at the (111) nt-Cu interface reached 1.14 μm/min, approximately eight times higher than that at the (110) nt-Cu interface (0.14 μm/min). This pronounced asymmetry arises from the distinct twin-boundary configurations relative to the principal diffusion direction. The horizontally oriented twins in (111) nt-Cu intersect vertical grain boundaries at high frequency, generating abundant triple junctions that reduce grain-boundary energy and lower the effective Cu diffusivity from the substrate. In contrast, the near-vertically oriented twins in (110) nt-Cu produce far fewer triple junctions, leaving grain-boundary diffusion channels largely open. This difference establishes a directional Cu concentration gradient across the molten solder, quantified by a concentration gradient driven flux that drives preferential IMC thickening at the (111) nt-Cu interface. In the as-soldered state, EBSD analysis shows that Cu 6 Sn 5 grains at the (111) exhibit a strong {11 2 ‾ 0} texture with an epitaxial relationship {11 2 ‾ 0}Cu 6 Sn 5 ||{111} Cu , whereas those at the (110) nt-Cu interface exhibit a preferred orientation in which the sample normal (RD) is clustered approximately 60° away from <0001> η (i.e., approximately 30° from <11 2 ‾ 0> η ). Upon prolonged soldering, the initially preferred crystallographic orientation of Cu 6 Sn 5 at both interfaces became random, driven by rapid Cu 3 Sn thickening that disrupts epitaxial matching at the (111) interface, and by transverse ripening that promotes coalescence of preferentially oriented Cu 6 Sn 5 grains at the (110) nt-Cu interface. These findings demonstrate that the relative orientation of coherent twin boundaries with respect to the principal diffusion direction is a critical microstructural parameter governing interfacial reaction kinetics, and they provide a mechanistic basis for the rational design of orientation-engineered under bump metallization structures in advanced electronic packaging.

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Publication Details

Journal
Materials Science in Semiconductor Processing
Published
2026-10-19
DOI
https://doi.org/10.1016/j.mssp.2026.111301
Primary Topic
Electronic Packaging and Soldering Technologies
Type
article
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article

Asymmetric interfacial reaction governed by twin orientation in hybrid nanotwinned copper interconnects

Mingliang L. Huang, S.N. Zhang
Materials Science in Semiconductor Processing
Electronic Packaging and Soldering Technologies
article

Asymmetric interfacial reaction governed by twin orientation in hybrid nanotwinned copper interconnects

Mingliang L. Huang, S.N. Zhang
article en

Abstract

The asymmetric interfacial reaction in (111) nanotwinned Cu (nt-Cu)/Sn/(110) nt-Cu interconnects was investigated using in-situ synchrotron radiation imaging and electron backscatter diffraction (EBSD). Real-time imaging reveals that the growth rate of interfacial intermetallic compounds (IMCs) at the (111) nt-Cu interface reached 1.14 μm/min, approximately eight times higher than that at the (110) nt-Cu interface (0.14 μm/min). This pronounced asymmetry arises from the distinct twin-boundary configurations relative to the principal diffusion direction. The horizontally oriented twins in (111) nt-Cu intersect vertical grain boundaries at high frequency, generating abundant triple junctions that reduce grain-boundary energy and lower the effective Cu diffusivity from the substrate. In contrast, the near-vertically oriented twins in (110) nt-Cu produce far fewer triple junctions, leaving grain-boundary diffusion channels largely open. This difference establishes a directional Cu concentration gradient across the molten solder, quantified by a concentration gradient driven flux that drives preferential IMC thickening at the (111) nt-Cu interface. In the as-soldered state, EBSD analysis shows that Cu 6 Sn 5 grains at the (111) exhibit a strong {11 2 ‾ 0} texture with an epitaxial relationship {11 2 ‾ 0}Cu 6 Sn 5 ||{111} Cu , whereas those at the (110) nt-Cu interface exhibit a preferred orientation in which the sample normal (RD) is clustered approximately 60° away from <0001> η (i.e., approximately 30° from <11 2 ‾ 0> η ). Upon prolonged soldering, the initially preferred crystallographic orientation of Cu 6 Sn 5 at both interfaces became random, driven by rapid Cu 3 Sn thickening that disrupts epitaxial matching at the (111) interface, and by transverse ripening that promotes coalescence of preferentially oriented Cu 6 Sn 5 grains at the (110) nt-Cu interface. These findings demonstrate that the relative orientation of coherent twin boundaries with respect to the principal diffusion direction is a critical microstructural parameter governing interfacial reaction kinetics, and they provide a mechanistic basis for the rational design of orientation-engineered under bump metallization structures in advanced electronic packaging.

Materials Science in Semiconductor ProcessingVol. 218
Dalian University of Technology (CN)
Openalex Percentile: Top 23%
Electronic Packaging and Soldering Technologies
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