Scalable Fabrication of 12-inch Polycrystalline Diamond Membranes
Scalable fabrication protocol produces 12-inch polycrystalline diamond membranes via microwave plasma chemical vapor deposition for advanced thermal management.
Authors
- 薛生杰
- Ding Wang (ORCID: https://orcid.org/0000-0001-9806-2901)
- Qi Wang (ORCID: https://orcid.org/0000-0001-7129-1974)
- Ping Wang (ORCID: https://orcid.org/0009-0008-2667-961X)
- Xiaoyu Yang (ORCID: https://orcid.org/0000-0003-4631-6900)
- Huarui Sun
- Haonan Li
- 梁智文
- Yang He
- Tao Wang
- Liangwei Lin
- Zhongqiang Wang
- Xinqiang Wang
Institutions
- Peking University (CN)
- Harbin Institute of Technology (CN)
- Ministry of Industry and Information Technology (CN)
Publication Details
- Journal
- National Science Review
- Published
- 2026-10-14
- DOI
- https://doi.org/10.1093/nsr/nwag645
- Primary Topic
- Diamond and Carbon-based Materials Research
- Type
- article
- Field-Weighted Citation Impact
- 0.00