Monolithically integrated four-channel optoelectronic wind sensor with a mushroom-shaped sensitive structure

This paper presents a novel wind sensor based on a monolithically integrated four-channel optoelectronic chip and a mushroom-shaped sensitive structure. The four-channel optoelectronic chip consists of a centrally positioned light-emitting diode (LED) surrounded by four symmetrically arranged photodetectors (PDs). By employing monolithic integrated manufacturing technology, the consistency among the four PDs is significantly enhanced, thereby ensuring the overall symmetry of the sensor. In addition, an environmentally robust mushroom-shaped wind-sensitive structure is designed to interact with airflow while packaging the optoelectronic chip, providing reliable protection against outdoor environmental conditions. The manufactured sensor is subsequently installed in a wind tunnel for a series of measurements. The results demonstrate the capability of the sensor to monitor wind speeds ranging from 0 to 18 m/s and wind direction from 0 to 360°. This innovative design paves the way for advancements in wind-sensing devices, positioning it as a promising candidate for practical applications across various fields.

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Publication Details

Journal
Microsystems & Nanoengineering
Published
2026-10-15
DOI
https://doi.org/10.1038/s41378-026-01441-8
Primary Topic
Advanced MEMS and NEMS Technologies
Type
article
Field-Weighted Citation Impact
0.00

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article

Monolithically integrated four-channel optoelectronic wind sensor with a mushroom-shaped sensitive structure

Shen Li, Yongjin Wang, Meixin Lu, 闫逸群 Yan Yiqun et al.
Microsystems & Nanoengineering
Advanced MEMS and NEMS Technologies
article

Monolithically integrated four-channel optoelectronic wind sensor with a mushroom-shaped sensitive structure

Shen Li, Yongjin Wang, Meixin Lu, 闫逸群 Yan Yiqun, Lili Gao, Yizhou Ye, Yunhao Peng, Anxu Wang, Xuefeng He, Jiabin Yan, Shu Wan
article en

Abstract

This paper presents a novel wind sensor based on a monolithically integrated four-channel optoelectronic chip and a mushroom-shaped sensitive structure. The four-channel optoelectronic chip consists of a centrally positioned light-emitting diode (LED) surrounded by four symmetrically arranged photodetectors (PDs). By employing monolithic integrated manufacturing technology, the consistency among the four PDs is significantly enhanced, thereby ensuring the overall symmetry of the sensor. In addition, an environmentally robust mushroom-shaped wind-sensitive structure is designed to interact with airflow while packaging the optoelectronic chip, providing reliable protection against outdoor environmental conditions. The manufactured sensor is subsequently installed in a wind tunnel for a series of measurements. The results demonstrate the capability of the sensor to monitor wind speeds ranging from 0 to 18 m/s and wind direction from 0 to 360°. This innovative design paves the way for advancements in wind-sensing devices, positioning it as a promising candidate for practical applications across various fields.

Microsystems & NanoengineeringVol. 12(1)
Chongqing University (CN), Nanjing University of Posts and Telecommunications (CN), Chongqing University of Technology (CN)
National Natural Science Foundation of China, Natural Science Foundation Project of Chongqing, Chongqing Science and Technology Commission
Openalex Percentile: Top 24%
Advanced MEMS and NEMS Technologies
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