Modular van der Waals MOSFETs through layer-by-layer chalcogen substitutions

In two-dimensional transition-metal dichalcogenides (TMDCs), the local electrostatic field of the chalcogen p -orbitals dictates the crystal field splitting of the transition metal d -orbitals, stabilizing diverse electronic states from semiconducting and semimetallic to exotic topological phases. On-demand substitution of the lattice chalcogens is therefore an efficient route to tuning TMDC electronic phases. Here, we custom-molded van der Waals (vdW) heterostructures by layer-by-layer vapor-phase chalcogen substitution starting from p -type WSe 2 multilayers into which we locally inscribed insulating WO x , n -type WS 2 , and semimetallic WTe 2 . This spatially precise conversion seamlessly integrated distinct electronic phases, both vertically and laterally, into modular vdW semiconductor heterostructures that are otherwise inaccessible. As a demonstration, we integrated WO x /WSe 2 local gate stacks to build ultrascaled metal oxide–semiconductor field effect transistors (MOSFETs), achieving an unprecedented subthreshold swing at subnanometer equivalent oxide thickness.

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Publication Details

Journal
Science
Published
2026-10-15
DOI
https://doi.org/10.1126/science.aei2693
Citations
1
Primary Topic
2D Materials and Applications
Type
article
Field-Weighted Citation Impact
1.38

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article

Modular van der Waals MOSFETs through layer-by-layer chalcogen substitutions

Seok Young Min, Si‐Young Choi, Jong Yun Choi, Cheol‐Joo Kim et al.
1 citations
Science
2D Materials and Applications
1.38
article

Modular van der Waals MOSFETs through layer-by-layer chalcogen substitutions

Seok Young Min, Si‐Young Choi, Jong Yun Choi, Cheol‐Joo Kim, H. M. Park, Moon‐Ho Jo, Chumki Nayak, Gi‐Yeop Kim, 김태호, Sung‐Hyuk Her, Chul‐Ho Lee, Sukho Lee, Yong‐Sung Kim, Taejoon Mo, Hyunje Cho, Choi Jaeho, Junsoo Yoon
article en
1 citations

Abstract

In two-dimensional transition-metal dichalcogenides (TMDCs), the local electrostatic field of the chalcogen p -orbitals dictates the crystal field splitting of the transition metal d -orbitals, stabilizing diverse electronic states from semiconducting and semimetallic to exotic topological phases. On-demand substitution of the lattice chalcogens is therefore an efficient route to tuning TMDC electronic phases. Here, we custom-molded van der Waals (vdW) heterostructures by layer-by-layer vapor-phase chalcogen substitution starting from p -type WSe 2 multilayers into which we locally inscribed insulating WO x , n -type WS 2 , and semimetallic WTe 2 . This spatially precise conversion seamlessly integrated distinct electronic phases, both vertically and laterally, into modular vdW semiconductor heterostructures that are otherwise inaccessible. As a demonstration, we integrated WO x /WSe 2 local gate stacks to build ultrascaled metal oxide–semiconductor field effect transistors (MOSFETs), achieving an unprecedented subthreshold swing at subnanometer equivalent oxide thickness.

ScienceVol. 394(6821)
Pohang University of Science and Technology (KR), Seoul National University (KR), Korea Research Institute of Standards and Science (KR), Institute for Basic Science (KR)
Korea Research Institute of Standards and Science, Institute for Basic Science
Openalex Percentile: Top 14%
2D Materials and Applications
1.38
DOISourceOpenAlex
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