Systematic opto-mechanical design approach for meter-long Nano-AKB mirror system at HEPS

A systematic opto-mechanical design approach is developed for a long Nano-AKB mirror system aimed at stable sub-50 nm hard X-ray nanofocusing. The approach integrates deformation–stiffness-balanced mirror clamping, hierarchical precision alignment, and thermomechanical stability management and has been applied to nanofocusing instruments at HEPS. During beamline commissioning at HEPS ID19, the system achieved a focal spot of 34.6 ± 1.31 nm × 41.6 ± 0.67 nm (H × V) at 20 keV while maintaining Z-displacement stability below 5 nm RMS. The results meet the design expectations, strongly attesting to the efficacy and practical viability of the proposed approach.

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Publication Details

Journal
Optics Express
Published
2026-10-06
DOI
https://doi.org/10.1364/oe.612296
Primary Topic
Advanced X-ray Imaging Techniques
Type
article
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article

Systematic opto-mechanical design approach for meter-long Nano-AKB mirror system at HEPS

Zongyang Yue, Bin Ji, Dianshuai Zhang, Ruiying Liao et al.
Optics Express
Advanced X-ray Imaging Techniques
article

Systematic opto-mechanical design approach for meter-long Nano-AKB mirror system at HEPS

Zongyang Yue, Bin Ji, Dianshuai Zhang, Ruiying Liao, Shanzhi Tang, Changrui Zhang, Wenkai Kang, Guangcai Chang, Ling Fan, Cheng Da, Weifan Sheng, Ming Li, Fang Liu, Lingfei Wang, Gang Li, Hao Qi, Xuejie Jiang, Haihan Yu, Yang Li
article en

Abstract

A systematic opto-mechanical design approach is developed for a long Nano-AKB mirror system aimed at stable sub-50 nm hard X-ray nanofocusing. The approach integrates deformation–stiffness-balanced mirror clamping, hierarchical precision alignment, and thermomechanical stability management and has been applied to nanofocusing instruments at HEPS. During beamline commissioning at HEPS ID19, the system achieved a focal spot of 34.6 ± 1.31 nm × 41.6 ± 0.67 nm (H × V) at 20 keV while maintaining Z-displacement stability below 5 nm RMS. The results meet the design expectations, strongly attesting to the efficacy and practical viability of the proposed approach.

Optics ExpressVol. 34(21)
Institute of Precision Mechanics (PL), Institute of High Energy Physics (CN), AviChina Industry & Technology (China) (CN), Precision Research (United States) (US), University of Chinese Academy of Sciences (CN), Beihang University (CN)
Openalex Percentile: Top 13%
Advanced X-ray Imaging Techniques
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Systematic opto-mechanical design approach for meter-long Nano-AKB mirror system at HEPS — Zongyang Yue, Bin Ji, et al. · Optics Express (2026) | TGRS Research Map | TGRS