Focused Electron Beam-Induced Deposition of Oblique Co and Fe Nanowires: Compositional and Magnetic Characterisation for Functional 3D Nanostructures

Abstract Focused electron beam induced deposition (FEBID) is an additive manufacturing technique uniquely suited for fabricating functional 3D nanostructures for a range of applications, including spintronic devices. However, the variation of growth dynamics associated with lateral movement of the electron beam results in structures with non-uniform composition when fabricating intricate 3D geometries. Herein, we measure changes in atomic composition and corresponding changes in magnetic induction in 3D ferromagnetic nanostructures with overhanging elements, e.g. bridges or arches. To investigate the effects of electron beam lateral movement, we fabricated Co and Fe nanowire (NW) structures with growth angle relative to the optic axis varying from 0° to 90°. The (scanning) transmission electron microscopy techniques of electron energy loss spectroscopy and off-axis electron holography were performed to map the NW elemental composition and magnetic induction as a function of NW growth angle. Comparison of the results reveals a reduction in metal content with increased growth angle in FEBID NWs. The magnitude of metal content reduction can be tuned by controlling electron beam parameters, and ferromagnetic NWs with approximately equal metal content at growth angles from 0° to 60° were fabricated by using the lowest viable electron beam voltage and the highest viable beam current to reduce the interaction volume and increase the metal content, respectively.