In-situ full-aperture measurement of large optical surfaces based on extended virtual source stitching deflectometry

Phase measuring deflectometry (PMD) is widely used for in-situ optical surface measurement, but its full-aperture capability is limited by the finite screen size when measuring large apertures. This paper proposes an extended virtual source stitching PMD (EVSS-PMD) method for in-situ full-aperture measurement. By translating the screen to different positions, the finite screen is extended into a larger virtual source. Since the camera and test surface remain fixed, all sub-apertures share a common coordinate frame, eliminating the need for multi-view point-cloud registration. To compensate for residual overlap mismatch caused by screen pose uncertainty, an affine compensation method is developed based on geometric analysis of the virtual source system. Experiments on a 220-mm-aperture flat mirror and a 340-mm-aperture off-axis parabolic mirror demonstrate smooth full-aperture reconstruction, with measurement accuracy of tens of nanometers relative to a ZYGO interferometer.

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Publication Details

Journal
Optics and Lasers in Engineering
Published
2026-10-03
DOI
https://doi.org/10.1016/j.optlaseng.2026.110155
Primary Topic
Optical measurement and interference techniques
Type
article
Field-Weighted Citation Impact
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article

In-situ full-aperture measurement of large optical surfaces based on extended virtual source stitching deflectometry

赵亚楠, Songlin Wan, Zhenqi Niu, Siyao Wu et al.
Optics and Lasers in Engineering
Optical measurement and interference techniques
article

In-situ full-aperture measurement of large optical surfaces based on extended virtual source stitching deflectometry

赵亚楠, Songlin Wan, Zhenqi Niu, Siyao Wu, Chaoyang Wei, Guochang Jiang, Zhen Wu
article en

Abstract

Phase measuring deflectometry (PMD) is widely used for in-situ optical surface measurement, but its full-aperture capability is limited by the finite screen size when measuring large apertures. This paper proposes an extended virtual source stitching PMD (EVSS-PMD) method for in-situ full-aperture measurement. By translating the screen to different positions, the finite screen is extended into a larger virtual source. Since the camera and test surface remain fixed, all sub-apertures share a common coordinate frame, eliminating the need for multi-view point-cloud registration. To compensate for residual overlap mismatch caused by screen pose uncertainty, an affine compensation method is developed based on geometric analysis of the virtual source system. Experiments on a 220-mm-aperture flat mirror and a 340-mm-aperture off-axis parabolic mirror demonstrate smooth full-aperture reconstruction, with measurement accuracy of tens of nanometers relative to a ZYGO interferometer.

Optics and Lasers in EngineeringVol. 208
Chinese Academy of Sciences (CN), Shanghai Institute of Optics and Fine Mechanics (CN), University of Chinese Academy of Sciences (CN)
Openalex Percentile: Top 14%
Optical measurement and interference techniques
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