In-situ full-aperture measurement of large optical surfaces based on extended virtual source stitching deflectometry
Phase measuring deflectometry (PMD) is widely used for in-situ optical surface measurement, but its full-aperture capability is limited by the finite screen size when measuring large apertures. This paper proposes an extended virtual source stitching PMD (EVSS-PMD) method for in-situ full-aperture measurement. By translating the screen to different positions, the finite screen is extended into a larger virtual source. Since the camera and test surface remain fixed, all sub-apertures share a common coordinate frame, eliminating the need for multi-view point-cloud registration. To compensate for residual overlap mismatch caused by screen pose uncertainty, an affine compensation method is developed based on geometric analysis of the virtual source system. Experiments on a 220-mm-aperture flat mirror and a 340-mm-aperture off-axis parabolic mirror demonstrate smooth full-aperture reconstruction, with measurement accuracy of tens of nanometers relative to a ZYGO interferometer.
Authors
- 赵亚楠
- Songlin Wan (ORCID: https://orcid.org/0000-0001-9740-2716)
- Zhenqi Niu (ORCID: https://orcid.org/0000-0002-5732-989X)
- Siyao Wu (ORCID: https://orcid.org/0009-0006-1298-4459)
- Chaoyang Wei
- Guochang Jiang
- Zhen Wu
Institutions
- Chinese Academy of Sciences (CN)
- Shanghai Institute of Optics and Fine Mechanics (CN)
- University of Chinese Academy of Sciences (CN)
Publication Details
- Journal
- Optics and Lasers in Engineering
- Published
- 2026-10-03
- DOI
- https://doi.org/10.1016/j.optlaseng.2026.110155
- Primary Topic
- Optical measurement and interference techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00