Electron Beam Deposition of Silicon–Carbon Coatings into the Groove of a Metal Detail

Abstract The results of silicon–carbon coatings deposition on an aluminum substrate, imitating a groove, by electron beam evaporation of silicon carbide are presented. The distribution of the thickness, composition, morphology, and hardness of the coating over the substrate sections was measured. An analytical model is proposed that makes it possible to calculate the deposition rate depending on the coordinate of the substrate site. The calculated and experimental results, presented in relative units, show a satisfactory agreement.