Influence of Modifying Additives on Resin-Bonded Diamond Tool and Single-Crystal Silicon Lapping Performance

To improve the interfacial tribological conditions, debris evacuation, and surface integrity in single-crystal silicon lapping using resin-bonded diamond tools, a multifunctional resin-bonded diamond tool incorporating lubricating, surface-quality-regulating, and pore-forming additives was developed. Single-factor experiments were conducted to evaluate the effects of graphite, MoS2, and Polytetrafluoroethylene (PTFE); CeO2, SiO2, and ZrO2; and NH4HCO3, NaHCO3, and NaCl on tool performance and silicon-surface quality. PTFE exhibited the best overall lubrication performance, reducing the temperature rise by 18.0% compared with the control. The addition of 1 wt.% CeO2 reduced the surface roughness Sa from 11.72 to 9.47 nm and decreased the residual compressive stress by approximately 86.5%. Moreover, 10 wt.% NH4HCO3 increased the apparent porosity from 6.76% to 32.42% and improved the sustainability of material removal. Based on the single-factor results, an L9 orthogonal experiment was performed using PTFE, CeO2, and NH4HCO3 as the control factors. Multi-response optimization identified a balanced formulation containing 1.5 wt.% PTFE, 1.0 wt.% CeO2, and 10 wt.% NH4HCO3. Validation experiments yielded a Sa of 8.46 nm, MRR = 58.85 nm/min, a material removal-to-tool wear ratio (W-ratio) of 7.67, and a residual stress of −55.20 MPa, demonstrating a favorable balance among surface quality, material-removal efficiency, and tool durability.