Benefits and perspectives of semantic data acquisition in low-temperature plasma physics

The scientific communities have recognized that structured storage and provision of data and technical information according to the FAIR data principles can represent a tremendous added value for research and development. This is reflected by the establishment of metadata schemas, ontologies, and knowledge graphs within the framework of the National Research Data Infrastructure (NFDI) in Germany and other projects in the field of research data management, where researchers from various fields work closely with computer scientists to develop sustainable infrastructures and tools. In this contribution, we present a basic ontology for low-temperature plasma (LTP) physics and show how a knowledge graph for LTP is created, which allows for easier reuse of data by providing a structured and interconnected representation of information. An application example demonstrates the development of an infrastructure for the simplified search of context-related information in patents, scientific literature and research data. Furthermore, we present how this can also support data-driven research and utilize the benefits of open-access publications. The work was funded by the German Federal Ministry of Research, Technology and Space (BMFTR) under the grant marks 16KOA013A and 16KOA013B and by the German Research Foundation, project 496963457.