The ASML Monopoly: Platform and Ecosystem Leadership in EUV Lithography

Scratching the surface of the leading manufacturer of extreme ultraviolet lithography technology used for manufacturing integrated circuits.

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Publication Details

Journal
Communications of the ACM
Published
2026-09-24
DOI
https://doi.org/10.1145/3838602
Primary Topic
Advancements in Photolithography Techniques
Type
article
Field-Weighted Citation Impact
0.00
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article

The ASML Monopoly: Platform and Ecosystem Leadership in EUV Lithography

MICHAEL A. CUSUMANO
Communications of the ACM
Advancements in Photolithography Techniques
article

The ASML Monopoly: Platform and Ecosystem Leadership in EUV Lithography

MICHAEL A. CUSUMANO
article en

Abstract

Scratching the surface of the leading manufacturer of extreme ultraviolet lithography technology used for manufacturing integrated circuits.

Communications of the ACM
Massachusetts Institute of Technology (US)
Openalex Percentile: Top 21%
Advancements in Photolithography Techniques
DOIOpen Access PDFOpenAlex
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The ASML Monopoly: Platform and Ecosystem Leadership in EUV Lithography — MICHAEL A. CUSUMANO · Communications of the ACM (2026) | TGRS Research Map | TGRS