ASML Hyper-NA EUV 0.5nm Lithography Process.

ASML Hyper-NA EUV 0.5nm Lithography Process.

Authors

Publication Details

Journal
Zenodo (CERN European Organization for Nuclear Research)
Published
2026-09-21
DOI
https://doi.org/10.5281/zenodo.22882633
Primary Topic
Advancements in Photolithography Techniques
Type
article
Field-Weighted Citation Impact
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article

ASML Hyper-NA EUV 0.5nm Lithography Process.

Michael Steven Rodriguez
Zenodo (CERN European Organization for Nuclear Research)
Advancements in Photolithography Techniques
article

ASML Hyper-NA EUV 0.5nm Lithography Process.

Michael Steven Rodriguez
article en

Abstract

No abstract available for this paper.

Zenodo (CERN European Organization for Nuclear Research)
Openalex Percentile: Top 20%
Advancements in Photolithography Techniques
DOIOpen Access PDFOpenAlex
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ASML Hyper-NA EUV 0.5nm Lithography Process. — Michael Steven Rodriguez · Zenodo (CERN European Organization for Nuclear Research) (2026) | TGRS Research Map | TGRS