High‐Temperature Magnetic Field Mapping Using a Single‐Crystal Diamond MEMS Resonator Array

ABSTRACT Magnetic imaging has long faced fundamental trade‐offs among speed, sensitivity, and spatial resolution, and its performance typically deteriorates at elevated temperatures. Here, we present a single‐crystal diamond (SCD) microelectromechanical system (MEMS) resonator array for spatial magnetic‐field mapping at elevated temperatures. An 8 × 8 cantilevers array enables pitch‐limited spatial magnetic‐field mapping with millisecond single‐pixel temporal response and nT Hz 1/2 magnetic noise level at 573 K, while maintaining frequency stability at parts‐per‐billion precision. These capabilities exhibit competitive performance in sensing metrics, enabling two‐ and three‐dimensional magnetic‐field reconstruction and demonstrate elevated‐temperature magnetic‐field mapping up to 573 K. These results demonstrate the potential of SCD MEMS resonator array for spatial magnetic‐field sensing under elevated‐temperature conditions.