Enhancing DLC micro-patterning punch for micro embossing of aluminum sheets

With the rising trend of miniaturization of multiple vital products in biomedical, semiconductor, and aerospace sectors, there is a need to fabricate high-quality micro-scale devices. The micro-embossing process has the potential to mass-produce these miniature products with high accuracy and low tolerance. In the quest to improve the micro-embossing process, 3D shaped diamond-like carbon (DLC) layer is used as a punching material due to its high mechanical properties and low frictional advantages. Furthermore, a 3D surface smoothing process is employed to reduce the roughness of the top and side walls of the 3D micro-patterns. Results show that the 3D smoothed micro-punch fabricates the designed micro-patterns onto a thin aluminum sheet with high dimensional accuracy and a low amount of defects compared to the non-smoothed micro-punch. This can be attributed to the capability of controlling the surface roughness, especially on the sidewalls of the micro-patterns, which helps in decreasing the frictional forces during the loading and unloading steps of the micro-embossing process. As a result, higher loading forces up to 20 kN of the room temperature micro-embossing process are possible with a greater filling ratio of almost 99%, which is similar to the hot micro-embossing technique.

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Publication Details

Journal
Journal of Manufacturing Processes
Published
2026-09-15
DOI
https://doi.org/10.1016/j.jmapro.2026.09.027
Primary Topic
Nanofabrication and Lithography Techniques
Type
article
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article

Enhancing DLC micro-patterning punch for micro embossing of aluminum sheets

Abdelrahman Farghali, Tatsuhiko Aizawa, Junho Choi
Journal of Manufacturing Processes
Nanofabrication and Lithography Techniques
article

Enhancing DLC micro-patterning punch for micro embossing of aluminum sheets

Abdelrahman Farghali, Tatsuhiko Aizawa, Junho Choi
article en

Abstract

With the rising trend of miniaturization of multiple vital products in biomedical, semiconductor, and aerospace sectors, there is a need to fabricate high-quality micro-scale devices. The micro-embossing process has the potential to mass-produce these miniature products with high accuracy and low tolerance. In the quest to improve the micro-embossing process, 3D shaped diamond-like carbon (DLC) layer is used as a punching material due to its high mechanical properties and low frictional advantages. Furthermore, a 3D surface smoothing process is employed to reduce the roughness of the top and side walls of the 3D micro-patterns. Results show that the 3D smoothed micro-punch fabricates the designed micro-patterns onto a thin aluminum sheet with high dimensional accuracy and a low amount of defects compared to the non-smoothed micro-punch. This can be attributed to the capability of controlling the surface roughness, especially on the sidewalls of the micro-patterns, which helps in decreasing the frictional forces during the loading and unloading steps of the micro-embossing process. As a result, higher loading forces up to 20 kN of the room temperature micro-embossing process are possible with a greater filling ratio of almost 99%, which is similar to the hot micro-embossing technique.

Journal of Manufacturing ProcessesVol. 176
Shibaura Institute of Technology (JP), Tokyo City University (JP), The University of Tokyo (JP)
Openalex Percentile: Top 21%
Nanofabrication and Lithography Techniques
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Enhancing DLC micro-patterning punch for micro embossing of aluminum sheets — Abdelrahman Farghali, Tatsuhiko Aizawa, et al. · Journal of Manufacturing Processes (2026) | TGRS Research Map | TGRS