Frequency control of superconducting resonators using integrated interferometers

Predictable frequency trimming of superconducting resonators at liquid-helium temperatures requires a tuning element whose usable range remains well defined despite screening currents and hysteresis. Here, we realize flux-controlled λ/4 coplanar-waveguide resonators terminated by two-junction DC superconducting quantum interference devices (SQUIDs) fabricated in a standard Nb/Al-AlOx/Nb multilayer process. Integrated on-chip flux-bias lines allow the resonant frequency to be controlled at 4.2 K. RF measurements show periodic frequency modulation with applied flux, with a maximum shift of δfr=8.63 MHz and a single-valued tuning interval of δfr0=2.85 MHz. Near half-integer flux quanta, the response exhibits hysteretic jumps caused by the finite SQUID loop inductance, so that the usable single-valued tuning interval is smaller than the full modulation range. We develop a semi-analytical model of the frequency–flux response, supported by numerical simulations and 3D electromagnetic extraction of the device parameters, which reproduces the measured hysteretic branches and identifies the SQUID loop inductance and junction critical current as the main parameters limiting the usable tuning range. These results provide a quantitative design framework for MHz-scale frequency trimming of Nb superconducting resonators in 4 K cryogenic readout circuits.