Comparison of different Zr deposition techniques on CNT thin films

In recent years, CNT pellicles have been investigated as suitable materials for filters for high-energy astrophysics missions, and more recently specifically for EUV missions,where Zr is a relevant material due to its transmittance in this band. In this work, we present the comparison of two different types of zirconium depositions on CNT pellicles, and manage to obtain a complete filter with performances compatible with the typical requirements for EUV missions.