Fine Tuners
This white paper documents the Fine Tuner portfolio at system level, including FT family photoaccelerants and LB family light-blocking routes for process and resolution adjustment. Fine Tuners allow users to adjust photoreactivity, cure depth, speed, resolution, optical behaviour and light penetration while maintaining the base resin family. They require controlled dosing, CRT alignment and printer-specific validation.
Authors
- Juan Segurola
Institutions
- Dynavax Technologies (Germany) (DE)
Publication Details
- Journal
- Zenodo (CERN European Organization for Nuclear Research)
- Published
- 2026-08-21
- DOI
- https://doi.org/10.5281/zenodo.22047954
- Primary Topic
- Advancements in Photolithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00