Field-tunable acoustic damping in FeGaB/AlScN shear-mode solidly mounted resonators

We theoretically investigate field-tunable acoustic damping in a FeGaB/tilted-AlScN/Mo thickness-shear solidly mounted resonator (SMR) using a coupled transfer-matrix and Landau–Lifshitz–Gilbert (TMM-LLG) model. The field- and frequency-dependent complex elastic stiffness of FeGaB is incorporated into the multilayer transfer matrix to calculate electrical impedance, series quality factor Qs, and effective electromechanical coupling keff2. A three-pair Mo/SiO2 Bragg reflector confines acoustic energy, while a 15° c-axis-tilted AlScN layer excites a pronounced shear mode near 1.69 GHz. Under perpendicular DC magnetic bias, acoustically driven ferromagnetic resonance (ADFMR) enables resonant phonon–magnon energy transfer and strongly reduces Qs. The resulting Q-factor modulation yields a maximum calculated sensitivity SQ ≈ 1400 T−1 at Ha ≈ 0.13 T and an estimated limit of detection (LoD) of 71.4 μT for ΔQmin = 0.1. Despite strong magneto–acoustic attenuation, keff2 remains above 3.69%, indicating sustained piezoelectric transduction. The contribution of this work is the device-level implementation of ADFMR-induced Qs modulation in a thickness-shear SMR, rather than a new magneto–acoustic mechanism. The required static bias is an external system-level requirement. The LoD is model-based and should not be interpreted as an experimentally validated noise floor or state-of-the-art detection limit.

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Publication Details

Journal
Journal of Applied Physics
Published
2026-08-18
DOI
https://doi.org/10.1063/5.0342764
Primary Topic
Mechanical and Optical Resonators
Type
article
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article

Field-tunable acoustic damping in FeGaB/AlScN shear-mode solidly mounted resonators

Shih‐Jye Sun, Re-Ching Lin, Hua‐Shu Hsu, Yeh-Tse Ou
Journal of Applied Physics
Mechanical and Optical Resonators
article

Field-tunable acoustic damping in FeGaB/AlScN shear-mode solidly mounted resonators

Shih‐Jye Sun, Re-Ching Lin, Hua‐Shu Hsu, Yeh-Tse Ou
article en

Abstract

We theoretically investigate field-tunable acoustic damping in a FeGaB/tilted-AlScN/Mo thickness-shear solidly mounted resonator (SMR) using a coupled transfer-matrix and Landau–Lifshitz–Gilbert (TMM-LLG) model. The field- and frequency-dependent complex elastic stiffness of FeGaB is incorporated into the multilayer transfer matrix to calculate electrical impedance, series quality factor Qs, and effective electromechanical coupling keff2. A three-pair Mo/SiO2 Bragg reflector confines acoustic energy, while a 15° c-axis-tilted AlScN layer excites a pronounced shear mode near 1.69 GHz. Under perpendicular DC magnetic bias, acoustically driven ferromagnetic resonance (ADFMR) enables resonant phonon–magnon energy transfer and strongly reduces Qs. The resulting Q-factor modulation yields a maximum calculated sensitivity SQ ≈ 1400 T−1 at Ha ≈ 0.13 T and an estimated limit of detection (LoD) of 71.4 μT for ΔQmin = 0.1. Despite strong magneto–acoustic attenuation, keff2 remains above 3.69%, indicating sustained piezoelectric transduction. The contribution of this work is the device-level implementation of ADFMR-induced Qs modulation in a thickness-shear SMR, rather than a new magneto–acoustic mechanism. The required static bias is an external system-level requirement. The LoD is model-based and should not be interpreted as an experimentally validated noise floor or state-of-the-art detection limit.

Journal of Applied PhysicsVol. 140(7)
National Pingtung University (TW), National Sun Yat-sen University (TW), National University of Kaohsiung (TW), National Kaohsiung University of Applied Sciences (TW)
Affordable and clean energy
Openalex Percentile: Top 11%
Mechanical and Optical Resonators
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Field-tunable acoustic damping in FeGaB/AlScN shear-mode solidly mounted resonators — Shih‐Jye Sun, Re-Ching Lin, et al. · Journal of Applied Physics (2026) | TGRS Research Map | TGRS