Flexible Tactile Actuator Arrays With Integrated Electroosmotic Pumps for Wearable Haptic Systems

ABSTRACT Conventional rigid haptic actuators are poorly suited for skin‐worn applications due to their inability to conform to curved body surfaces. To address this, we introduce a flexible tactile actuator array with integrated electroosmotic pumps, designed to deliver reliable tactile feedback while conforming to curved and non‐planar body surfaces. The device consists of soft silicone, flexible printed circuit boards, a glass fiber filter, and propylene carbonate as the actuating fluid, enabling low‐current electroosmotic pumping at reduced voltage compared to conventional electrohydraulic approaches. The effects of electrode geometry parameters, including hole number, spacing, and size, on actuator performance were systematically evaluated. Results show a maximum free‐space out‐of‐plane deformation of 4.0 mm under 250 V, measured at the center of a circular silicone membrane (10 mm in active diameter, 250 thick), with negligible performance degradation after 1,000 cycles of 90 physical bending. Under a bipolar 250 V square‐wave driving protocol, a representative electrode configuration exhibits a 10%–90% rise time of approximately 2.55 s. The multi‐channel design enables independent voltage control of each actuator element, allowing diverse spatial actuation patterns without physical reconfiguration. These findings support the platform's potential for spatially configurable tactile displays and wrist‐worn directional cueing systems.