Sequential Fabrication and Heterogeneous Assembly Process for a Five-Layer Optoelectronic RF-Photonic System-on-Package (N12 / 12N Platform)

This paper specifies a sequential, layer-by-layer fabrication and heterogeneous assembly process for the MVMLabs Model 12N (“N12”) system-on-package, a five-layer optoelectronic radio-frequency photonic module integrating TSMC 3 nm (N3E) logic, HBM3e memory, a silicon-nitride optical routing layer, a dynamic holographic polymer storage layer, an In:ZnO/p-Si optoelectronic carrier-generation layer, and a GaAs RF/microwave transceiver layer on a 65 nm silicon CoWoS-S interposer. Building on the operational performance profile and optimization appendix previously established for this architecture, this document translates each layer's target process window into an ordered manufacturing sequence — interposer fabrication, waveguide and photodetector formation, holographic polymer deposition and encapsulation, die-level bonding, and final package finishing — together with the process control parameters, in-line test checkpoints, and yield/qualification considerations required to move the concept from TRL 2–4 toward a pilot-line-manufacturable article. The process flow is presented as a concept-level engineering disclosure; it is not a validated production traveler and several unit operations (notably co-integration of a photorefractive polymer layer within a 700+ W thermal budget package) remain open engineering risks requiring further TRL advancement.

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Publication Details

Journal
Open Science Framework
Published
2026-07-30
DOI
https://doi.org/10.17605/osf.io/uv7be
Primary Topic
3D IC and TSV technologies
Type
article
Field-Weighted Citation Impact
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article

Sequential Fabrication and Heterogeneous Assembly Process for a Five-Layer Optoelectronic RF-Photonic System-on-Package (N12 / 12N Platform)

Gavriil Michas
Open Science Framework
3D IC and TSV technologies
article

Sequential Fabrication and Heterogeneous Assembly Process for a Five-Layer Optoelectronic RF-Photonic System-on-Package (N12 / 12N Platform)

Gavriil Michas
article en

Abstract

This paper specifies a sequential, layer-by-layer fabrication and heterogeneous assembly process for the MVMLabs Model 12N (“N12”) system-on-package, a five-layer optoelectronic radio-frequency photonic module integrating TSMC 3 nm (N3E) logic, HBM3e memory, a silicon-nitride optical routing layer, a dynamic holographic polymer storage layer, an In:ZnO/p-Si optoelectronic carrier-generation layer, and a GaAs RF/microwave transceiver layer on a 65 nm silicon CoWoS-S interposer. Building on the operational performance profile and optimization appendix previously established for this architecture, this document translates each layer's target process window into an ordered manufacturing sequence — interposer fabrication, waveguide and photodetector formation, holographic polymer deposition and encapsulation, die-level bonding, and final package finishing — together with the process control parameters, in-line test checkpoints, and yield/qualification considerations required to move the concept from TRL 2–4 toward a pilot-line-manufacturable article. The process flow is presented as a concept-level engineering disclosure; it is not a validated production traveler and several unit operations (notably co-integration of a photorefractive polymer layer within a 700+ W thermal budget package) remain open engineering risks requiring further TRL advancement.

Open Science Framework
Industry, innovation and infrastructure
Openalex Percentile: Top 16%
3D IC and TSV technologies
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