Carbon surface structures on the patterned nickel substrates

The possibility of synthesizing carbon structures by chemical vapor deposition (CVD) without applying an additional catalyst to the surface of metals that are catalytically active in hydrocarbon pyrolysis processes has been experimentally demonstrated. Planar and non-planar structures of sub-millimeter (∼500 × 500 μm2) scale have been obtained on polycrystalline nickel substrates. The surface structuring of nickel substrates was performed by local modification of the surface catalytic properties, as well as by forming the surface relief by the method of plastic surface deformation. For planar structures, the modification of the surface properties was carried out by ion bombardment through a mask. For non-planar structures, the local activation of the previously passivated surface was carried out by mechanical grinding-polishing. The obtained structures contain two forms of carbon: turbostratic graphite and carbon nanotubes. It has been established that both forms of carbon can be produced in a single CVD process.