Design and experiment of double closed-loop quadrature error correction system for MEMS multi-ring disk gyroscope

Purpose This study aims to propose a “double closed-loop” control circuit to eliminate quadrature error based on micro electro mechanical system (MEMS) multi-ring disk gyroscope (MRDG). Design/methodology/approach First of all, this article analyzes the causes of quadrature error in the MEMS MRDG and the output signal of the MEMS MRDG. Special attention is paid to the quadrature signals generated due to stiffness coupling in the MEMS MRDG, and a “double closed-loop” control circuit mode is adopted to simulate, calibrate and test the quadrature signals. Finally, detailed analysis and simulation were conducted using the established system model, and relevant measurement and control circuits were constructed for experimental study. Findings The experimental results show that when using the “double closed-loop” control circuit for the MEMS gyroscope prototype testing, the scale factor of the “double closed-loop” control circuit is 0.5127/mV/(°/s), the Bias stability (BI) is 1.54°/h and the operating bandwidth is approximately 18 Hz at a range of ± 100°/s. Originality/value This work presents a novel structure of MEMS MRDG and analyze quadrature error based on MEMS MRDG. A novel circuit structure of “double closed-loop” for quadrature error correction is proposed which can be widely applied in the field of the MEMS gyroscope.