Dynamic asymmetric strain imprinted into substrates by an oxide thin film
In film-substrate systems, the substrate role is often considered to be limited to providing static mechanical constraints. Dynamic film-substrate interactions when a structural change in the film modifies the substrate are generally disregarded. Using combined X-ray and electron microscopies, we observed that the electrically induced filament in a VO 2 film created strong asymmetric strain in the underlying Al 2 O 3 substate. This asymmetric substrate strain fed back into the film and defined the filament expansion direction, revealing the importance of film-substrate dynamic interactions in determining film functionality. Furthermore, the strain imprint propagated at least tens of microns deep into the substrate, exceeding the film thickness more than 200 times, potentially enabling substrate functionalization as an active mechanical coupling media in 3D-integrated microelectronics architectures.
Authors
- Rourav Basak (ORCID: https://orcid.org/0000-0003-1609-8316)
- Z. Islam (ORCID: https://orcid.org/0000-0002-7495-9762)
- Elliot Kisiel (ORCID: https://orcid.org/0000-0001-7175-5820)
- Chuhang Liu (ORCID: https://orcid.org/0000-0001-7162-4708)
- Alex Frañó (ORCID: https://orcid.org/0000-0001-9316-129X)
- Spencer A. Reisbick (ORCID: https://orcid.org/0000-0002-7882-4152)
- Arndt Last (ORCID: https://orcid.org/0000-0003-0658-9664)
- Erbin Qiu (ORCID: https://orcid.org/0000-0001-7446-9248)
- Junjie Li (ORCID: https://orcid.org/0000-0001-8516-5506)
- Iván K. Schuller (ORCID: https://orcid.org/0000-0002-9078-7120)
- Andreas Glatz (ORCID: https://orcid.org/0000-0002-2007-3851)
- Alexandre Pofelski (ORCID: https://orcid.org/0000-0002-4653-9197)
- Pavel Salev (ORCID: https://orcid.org/0000-0002-1171-9219)
- Ishwor Poudyal (ORCID: https://orcid.org/0000-0002-3498-9801)
- Kaan Yay (ORCID: https://orcid.org/0000-0002-4078-6613)
- Zhan Zhang (ORCID: https://orcid.org/0000-0002-7618-6134)
- Yimei Zhu (ORCID: https://orcid.org/0000-0002-1638-7217)
- Wei He (ORCID: https://orcid.org/0000-0002-0519-0590)
- Umeshkumar Patel
Institutions
- Karlsruhe Institute of Technology (DE)
- Northern Illinois University (US)
- Argonne National Laboratory (US)
- University of Denver (US)
- Brookhaven National Laboratory (US)
- SLAC National Accelerator Laboratory (US)
- University of California San Diego (US)
- Stanford University (US)
Publication Details
- Journal
- Science
- Published
- 2026-06-18
- DOI
- https://doi.org/10.1126/science.adt9347
- Primary Topic
- Transition Metal Oxide Nanomaterials
- Type
- article
- Field-Weighted Citation Impact
- 0.00