Effect of Annealing in Air and Dry Nitrogen on MoOx Films Obtained by Magnetron Sputtering

Substoichiometric molybdenum oxide is widely utilized as a hole transport layer (HTL) in polymer solar cells and perovskite solar cells. In this study, the possibility of developing MoOx layers applicable as HTLs with different characteristics by magnetron sputtering from a MoO3 target and annealing in dry nitrogen or air is explored. The optical transmission and reflection, optical band gap, FTIR and Raman spectra, crystallinity, conductivity, and work function of the films are studied depending on deposition and annealing conditions. The results demonstrate that it is possible to tune the properties of the obtained films with a view toward their application in solar cells.