Electron-induced ionisation of the C₂F₆ molecule

Electron-induced ionisation cross-sections and corresponding ionisation rate coefficients have been evaluated for the C₂F₆ molecule. Evaluated results by using the Jain-Khare semi-empirical approach of the total ionisation cross-section showing good agreement with presently available theoretical and experimental data sets. Single differential cross-sections have also been calculated for the first time at fixed incident electron energies of 100 and 200 eV. Double differential cross-sections (DDCS) have also been calculated for the first time at fixed incident electron energies of 100 and 200 eV with fixed incident angles of 30° and 60°. Three-dimensional profiles of DDCS, varying with angle and secondary electron energy, have also been generated.