Physical Unclonable Function Based on 3D‐NAND Flash Array Structure With Multi‐Chip Implementation

As a promising hardware-based security primitive, physical unclonable functions (PUFs) exploit stochastic, process-induced variations in physical properties to generate unique and unclonable device fingerprints. However, conventional CMOS-based PUFs require large and complex circuitry, leading to increased area and power consumption. To address this, we propose a PUF based on a 3D-NAND flash array utilizing intrinsic string current variations. Unlike prior write-based approaches, it employs read operations for CRP extraction, thereby avoiding stress-induced degradation. Challenges are applied via string select lines and bitlines, while each wordline functions as an independent PUF chip. A 1-bit response is generated by comparing summed string currents. Thanks to the high cell density of 3D-NAND flash, multiple stacked PUF chips with an exponentially large CRP capacity can be integrated into a single array. We fabricated 48 × 24 planar NAND flash arrays using charge-trap flash, confirming current variability due to process variation and randomly formed poly-Si grain boundaries. A 48 × 24 × 8 3D-NAND PUF was implemented using measured data, achieving near-ideal PUF metrics and passing autocorrelation analysis, all 16 NIST statistical tests and ML attack simulations. These results highlight the potential of 3D-NAND flash for scalable, reliable hardware security.