Substrate insulated Josephson junctions for superconducting quantum circuits
We have developed a fabrication technique for Josephson junctions that employs a three-dimensional patterned, low-loss substrate instead of commonly used organic resists. The technique enables the fabrication of high-quality trilayer junctions from a wide range of geometries and materials, including high-melting-point superconductors such as tantalum or niobium. The junction electrodes are free from intentionally introduced oxides and organic materials, which are known sources of decoherence. We fabricate and characterize underdamped Nb/AlOx/Nb junctions of different sizes in several geometries.
Authors
- Sergei Masis (ORCID: https://orcid.org/0000-0001-7741-0794)
- Jürgen Lisenfeld (ORCID: https://orcid.org/0000-0001-8605-4373)
- Danny Reuter (ORCID: https://orcid.org/0000-0003-4062-3192)
- Hannes Rotzinger (ORCID: https://orcid.org/0000-0003-0467-2480)
- Alexey Vladimirovich Ustinov (ORCID: https://orcid.org/0000-0002-1202-1787)
- Jean-Baptiste Kammerer (ORCID: https://orcid.org/0009-0005-2908-7423)
- U. Strobel (ORCID: https://orcid.org/0009-0000-2694-3785)
- L. Radtke (ORCID: https://orcid.org/0000-0001-7015-8928)
- J. N. Voss
- L. Kamps
- J. Luo-Hofmann (ORCID: https://orcid.org/0009-0004-5825-4537)
- J. Lenschen (ORCID: https://orcid.org/0009-0009-3058-1743)
Institutions
- Karlsruhe Institute of Technology (DE)
- Fraunhofer Institute for Electronic Nano Systems (DE)
Publication Details
- Journal
- Applied Physics Letters
- Published
- 2026-09-28
- DOI
- https://doi.org/10.1063/5.0349777
- Primary Topic
- Physics of Superconductivity and Magnetism
- Type
- article
- Field-Weighted Citation Impact
- 0.00