From dopant diffusion to optical functionality: A computational study of hyperdoped silicon

A comprehensive first-principles investigation of chalcogen-hyperdoped silicon is presented, focusing on the microscopic mechanisms driving the insulator-to-metal transition (IMT) and the associated infrared (IR) optical response. Using density functional theory and many-body perturbation theory, the formation energies and statistical probabilities of dopant complexes formed during rapid thermal annealing are analyzed. The dopant diffusion length Λ d is shown to critically influence the distribution of defect types and the IMT threshold concentration x c . In particular, for small diffusion lengths, chalcogen monomers dominate the defect landscape near the IMT, giving rise to distinct IR absorption features. Quasiparticle corrections and dielectric functions are computed for Si:Se and Si:Te, revealing absorption peaks in the short- and mid-wavelength IR regions. These results provide insight into the interplay between defect chemistry and optical properties in hyperdoped semiconductors, with implications for infrared photodetectors and intermediate-band photovoltaics.

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Publication Details

Journal
Microelectronic Engineering
Published
2026-06-08
DOI
https://doi.org/10.1016/j.mee.2026.112475
Primary Topic
Silicon and Solar Cell Technologies
Type
article
Field-Weighted Citation Impact
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article

From dopant diffusion to optical functionality: A computational study of hyperdoped silicon

A. Debernardi
Microelectronic Engineering
Silicon and Solar Cell Technologies
article

From dopant diffusion to optical functionality: A computational study of hyperdoped silicon

A. Debernardi
article en

Abstract

A comprehensive first-principles investigation of chalcogen-hyperdoped silicon is presented, focusing on the microscopic mechanisms driving the insulator-to-metal transition (IMT) and the associated infrared (IR) optical response. Using density functional theory and many-body perturbation theory, the formation energies and statistical probabilities of dopant complexes formed during rapid thermal annealing are analyzed. The dopant diffusion length Λ d is shown to critically influence the distribution of defect types and the IMT threshold concentration x c . In particular, for small diffusion lengths, chalcogen monomers dominate the defect landscape near the IMT, giving rise to distinct IR absorption features. Quasiparticle corrections and dielectric functions are computed for Si:Se and Si:Te, revealing absorption peaks in the short- and mid-wavelength IR regions. These results provide insight into the interplay between defect chemistry and optical properties in hyperdoped semiconductors, with implications for infrared photodetectors and intermediate-band photovoltaics.

Microelectronic EngineeringVol. 306
Semiconductor Manufacturing International (Italy) (IT)
Affordable and clean energy
Openalex Percentile: Top 10%
Silicon and Solar Cell Technologies
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From dopant diffusion to optical functionality: A computational study of hyperdoped silicon — A. Debernardi · Microelectronic Engineering (2026) | TGRS Research Map | TGRS