Pressure Measurement in Hydrogen Gas using Zirconia Structure Body Cr-N Thin Film Pressure Sensor

The authors are developing a high-sensitivity, small-sized hydrogen pressure sensor that can be built into a container. So far, we have succeeded in developing an unprecedented type of pressure sensor with a diaphragm-type strain-generating structure that is highly sensitive in the low pressure range of 1 MPa or less, which is mainly used in hydrogen storage alloys. In this study, we measured the pressure during hydrogen absorption and desorption in a pressure vessel containing a hydrogen storage alloy using such a Cr-N thin film/zirconia base pressure sensor element, and confirmed that it is possible to measure the pressure change behavior stably. Applications such as storage amount measurement in hydrogen storage alloys and detection of gas leaks in a pressure vessel can also be expected.