Micro-transfer-printing: Alternative to polymeric adhesive bonding

This extended abstract studied the use of spin-on-glass (SOG) for micro-transfer-printing (μTP), as an alternative to conventional polymeric adhesive such as BCB and Intervia. Once cured, SOG behaves as transparent oxide layer and is suitable for rugged environments. The authors demonstrated the μTP of both 200 nm thick lithium niobate films and 3.2 μm thick a-Si cladded lithium niobate chiplets on SOG layer as thin as 50 nm.