Alignment strategies for white-light interference microscopes in the visible and UV ranges

• A complete alignment protocol is presented for two broadband Linnik interferometers. • Optical components and alignment method well-adapted for interferometric measurements in the UV-visible-near IR (300–1100 nm). • Alignment minimizes chromatic aberrations and compensates for optical losses. • Successful implementation enables high-resolution topographic and spectroscopic imaging. • Provides a robust experimental basis for future nanoscale material characterization.

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Publication Details

Journal
Optics and Lasers in Engineering
Published
2026-05-22
DOI
https://doi.org/10.1016/j.optlaseng.2026.109872
Primary Topic
Near-Field Optical Microscopy
Type
article
Field-Weighted Citation Impact
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article

Alignment strategies for white-light interference microscopes in the visible and UV ranges

Sébastien Marbach, Rémy Claveau, Jesse Schiffler, Olivier Félix et al.
Optics and Lasers in Engineering
Near-Field Optical Microscopy
article

Alignment strategies for white-light interference microscopes in the visible and UV ranges

Sébastien Marbach, Rémy Claveau, Jesse Schiffler, Olivier Félix, Farid Mahfoud, Matthias Pauly, Paul Montgomery, Manuel Flury
article en

Abstract

• A complete alignment protocol is presented for two broadband Linnik interferometers. • Optical components and alignment method well-adapted for interferometric measurements in the UV-visible-near IR (300–1100 nm). • Alignment minimizes chromatic aberrations and compensates for optical losses. • Successful implementation enables high-resolution topographic and spectroscopic imaging. • Provides a robust experimental basis for future nanoscale material characterization.

Optics and Lasers in EngineeringVol. 204
École Normale Supérieure de Lyon (FR), Centre National de la Recherche Scientifique (FR), Institut Charles Sadron (FR), Université de Lyon (FR), Laboratoire de Physique de l'ENS de Lyon (FR), Université de Strasbourg (FR)
Openalex Percentile: Top 9%
Near-Field Optical Microscopy
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