Subtracting Interferences in X‐Ray Spectra Obtained With Grating Spectrometers

ABSTRACT Higher order diffraction from surface contamination poses a major challenge for soft x‐ray spectral analysis using reflection zone plate spectrometers in electron probe microanalysis. We developed two correction methods applied to the Al L 2,3 and Zn M 2,3 emissions in AlZn60 alloy spectra: sequential overlay and subtraction of C Kα and O Kα reference spectra, and subtraction of O Kα higher order contributions using an isolated peak of the sample under study. The second subtraction method provides superior correction of oxygen interferences while preserving intrinsic emission shapes. These approaches were validated on the Si L and Al L bands of the leuchtenbergite mineral.