Thin-Film Platinum Heaters: Deposition Optimization, Numerical Modeling, and Characterization

This work investigates the design, simulation, and characterization of thin-film platinum resistive heaters fabricated by magnetron sputtering. Finite element simulations were performed in COMSOL Multiphysics to analyze heat generation and temperature distribution as a function of heater geometry under steady-state conditions. The influence of convective heat transfer on temperature uniformity and thermal efficiency was systematically examined. Platinum thin films deposited by magnetron sputtering were characterized in terms of their structural, morphological, and electrical properties. The crystallographic structure was analyzed using X-ray diffraction, while the surface morphology and microstructure were examined by atomic force microscopy and scanning electron microscopy. Electrical conductivity measurements were carried out to evaluate resistive behavior relevant to heater performance. All characterizations were conducted for as-deposited samples and after post-deposition annealing at 500 °C to assess the effect of thermal treatment on film stability and properties. The simulation results were experimentally validated by infrared thermography, allowing a direct comparison between calculated and measured temperature distributions. The combined numerical and experimental approach enables the correlation among the deposition conditions, microstructural evolution, geometry, and electrical heating performance, providing guidelines for the optimization of thin-film platinum resistive heaters.