Performance of TiAlN multilayer coatings prepared by hybrid multi-arc ion plating and high-power impulse magnetron sputtering

TiAlN coatings with different modulation ratios were prepared on 42CrMo4 steel by hybrid multiarc ion plating and high-power impulse magnetron sputtering (HiPIMS). As the HiPIMS fraction increased, the coating surface showed fewer macroparticle-related defects and the cross-sectional structure became more uniform and compact. XRD analysis indicated that all coatings were mainly composed of face-centered cubic (Ti,Al)N with a weak AlN peak, while a slight shift of the (111) peak and an increase in the (200) reflection suggested a modulation-ratio-dependent evolution in texture and structural state. Among the alternating coatings, the critical load (LC2) increased from 22 to 47 N and the wear rate decreased from 4.95 × 10−4 to 2.60 × 10−4 μm3⋅(N μm)−1 as the modulation ratio increased from 1:0.5 to 1:2. Electrochemical tests showed that the 1:2 coating exhibited the lowest corrosion current density, the highest polarization resistance, and the largest capacitive arc radius, indicating the best overall corrosion resistance among the alternating coatings. Overall, increasing the HiPIMS contribution effectively improved the comprehensive performance of the alternating TiAlN coatings.

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Publication Details

Journal
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Published
2026-05-18
DOI
https://doi.org/10.1116/6.0005359
Primary Topic
Metal and Thin Film Mechanics
Type
article
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article

Performance of TiAlN multilayer coatings prepared by hybrid multi-arc ion plating and high-power impulse magnetron sputtering

龚育, Hailong Zhang, Leilei Chen, Ziran Feng et al.
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Metal and Thin Film Mechanics
article

Performance of TiAlN multilayer coatings prepared by hybrid multi-arc ion plating and high-power impulse magnetron sputtering

龚育, Hailong Zhang, Leilei Chen, Ziran Feng, Xingjian Che
article en

Abstract

TiAlN coatings with different modulation ratios were prepared on 42CrMo4 steel by hybrid multiarc ion plating and high-power impulse magnetron sputtering (HiPIMS). As the HiPIMS fraction increased, the coating surface showed fewer macroparticle-related defects and the cross-sectional structure became more uniform and compact. XRD analysis indicated that all coatings were mainly composed of face-centered cubic (Ti,Al)N with a weak AlN peak, while a slight shift of the (111) peak and an increase in the (200) reflection suggested a modulation-ratio-dependent evolution in texture and structural state. Among the alternating coatings, the critical load (LC2) increased from 22 to 47 N and the wear rate decreased from 4.95 × 10−4 to 2.60 × 10−4 μm3⋅(N μm)−1 as the modulation ratio increased from 1:0.5 to 1:2. Electrochemical tests showed that the 1:2 coating exhibited the lowest corrosion current density, the highest polarization resistance, and the largest capacitive arc radius, indicating the best overall corrosion resistance among the alternating coatings. Overall, increasing the HiPIMS contribution effectively improved the comprehensive performance of the alternating TiAlN coatings.

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and PhenomenaVol. 44(4)
Yangtze Optical Electronic (China) (CN), Wuhan Research Institute of Materials Protection (CN), Yangtze River Pharmaceutical Group (China) (CN)
Openalex Percentile: Top 9%
Metal and Thin Film Mechanics
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