Influence of primary electron beam-induced material heating

Abstract The manuscript investigates the issue of localized heating in three different materials under exposure to a primary electron beam during environmental scanning electron microscope observation. Mathematical-physics analyses of two beam power variants were performed using Ansys Fluent system: one with very low energy load on the material and the other with relatively high power. The localized heating state of the material was monitored, with particular attention to the cooling time required for the heated spot to return to its initial temperature, thereby preventing heat accumulation. Graphic abstract