Impact of Surface Treatment on Noise in PL Measurements of Silicon Vacancies in 4H-SiC Lateral PIN-Diodes

environment. Single emitters in these PIN-diodes show an increased signal-to-noise ratio of 15 for near-surface and 50 for deeper emitters on both c-plane and a-plane wafers.

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Publication Details

Journal
Nano Letters
Published
2026-05-12
DOI
https://doi.org/10.1021/acs.nanolett.6c00646
Primary Topic
Silicon Carbide Semiconductor Technologies
Type
article
Field-Weighted Citation Impact
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article

Impact of Surface Treatment on Noise in PL Measurements of Silicon Vacancies in 4H-SiC Lateral PIN-Diodes

Susanne Beuer, Christian Miersch, Alexander May, Jannik H. Schwarberg et al.
Nano Letters
Silicon Carbide Semiconductor Technologies
article

Impact of Surface Treatment on Noise in PL Measurements of Silicon Vacancies in 4H-SiC Lateral PIN-Diodes

Susanne Beuer, Christian Miersch, Alexander May, Jannik H. Schwarberg, Mathias Rommel, Wolfgang Knolle, Christian Gobert, Jörg Schulze, Chihang Luo, Fabian Magerl, Martin Siebert, Franziska C. Beyer, Jan F. Dick, Heino Möller
article en

Abstract

environment. Single emitters in these PIN-diodes show an increased signal-to-noise ratio of 15 for near-surface and 50 for deeper emitters on both c-plane and a-plane wafers.

Nano Letters
University of Science and Technology of China (CN), Friedrich-Alexander-Universität Erlangen-Nürnberg (DE), Advanced Materials and Devices (United States) (US), Intego (Germany) (DE), Fraunhofer Institute for Integrated Systems and Device Technology (DE), Leibniz Institute of Surface Engineering (DE)
Deutsche Forschungsgemeinschaft, Chinesisch-Deutsche Zentrum für Wissenschaftsförderung
Affordable and clean energy
Openalex Percentile: Top 8%
Silicon Carbide Semiconductor Technologies
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