Chaotic Nanostructured Film via Localized Interface Anchor for 10 Nm‐Resolution Encryptions

ABSTRACT Manipulation of the chaoticity in 2D materials can significantly expand their applications that require high information entropy. However, achieving large‐area films with multiple‐dimensional chaoticity at the nanoscale remains challenging. Herein, we propose a localized interface anchor strategy to controllably synthesize wafer‐scale MoS 2 films with nanoscale grains, which is initiated by monodispersing and localizing Mo clusters on sapphire substrates and followed by anti‐epitaxy growth. The wafer‐scale MoS 2 films feature five chaotic dimensions, including domain size, thickness, orientation, atomic defects, and interlayer coupling. Physical unclonable functions (PUFs) of MoS 2 ‐based chaotic films exhibit a spatial resolution of 10 nm and an ultrahigh challenge response pairs (CRPs) density of 1.5 × 10 5 pairs/µm 2 , outperforming commercial optical PUFs by 10 5 ‐fold in capacity while reducing size by three orders of magnitude. The PUFs show high readability (intra‐Hamming distance (HD): 0.254%), unpredictability (inter‐HD: 49.89%), and ultra‐low bit error rate of 4.5 × 10 −37 . This work paves the way for fabricating highly chaotic nanostructured films, offering an approach to develop PUFs for ultra‐high‐resolution encryption.