Development of a novel radially-distributed spiral bilayer thermopile infrared sensor with enhanced responsivity
achieved by the non-spiral counterpart. With its high responsivity and CMOS-compatible fabrication, the proposed thermopile offers a cost-effective solution for next-generation, high-resolution infrared imagers.
Authors
- Dehui Xu (ORCID: https://orcid.org/0000-0002-7181-0137)
- Yang Lv (ORCID: https://orcid.org/0000-0003-2915-7071)
- Wanli Jiang (ORCID: https://orcid.org/0009-0005-7121-828X)
- Weixuan Jing
- Ping Yang
- Yong Xia (ORCID: https://orcid.org/0009-0000-4386-3357)
- Xiangguang Han
- Yiwei Tang
- Dejiang Lu
- Xinyao Meng
- Libo Zhao (ORCID: https://orcid.org/0000-0001-6101-8173)
Institutions
- Yantai University (CN)
- CRRC (China) (CN)
- Shanghai Sunshine Rehabilitation Center (CN)
- Xi'an Jiaotong University (CN)
Publication Details
- Journal
- Microsystems & Nanoengineering
- Published
- 2026-05-11
- DOI
- https://doi.org/10.1038/s41378-026-01278-1
- Primary Topic
- Transition Metal Oxide Nanomaterials
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Natural Science Foundation of China