Thermal Stability of Sb‐, Mo‐, Nb‐, and W‐Doped SnO ₂ for High‐Temperature Transparent Thin‐Films

ABSTRACT This study investigates SnO 2 thin films doped with antimony (Sb), molybdenum (Mo), niobium (Nb), and tungsten (W) synthesized by spray pyrolysis using SnCl 4 as the precursor. A range of dopant concentrations (1–4 at.%) was explored, with films deposited on both glass and thermally robust ceramic substrates, enabling thermal stability testing beyond typical glass limitations. The films' structural, morphological, optical, and electrical properties were assessed using XRD, Raman spectroscopy, SEM, UV–vis spectroscopy, and four‐point probe measurements. Notably, the films exhibited sheet resistances between 10 and 93 Ω sq −1 at optimal dopant concentrations (2–3.5 at.%). The thermal stability was evaluated under oxidative and inert atmospheres up to 1000°C, surpassing the degradation thresholds of conventional FTO and ITO. Sb‐doped SnO 2 maintained conductivity up to 900°C, outperforming commercial FTO. These results demonstrate the potential of doped SnO 2 films for high‐temperature conductive applications and transparent thin‐films.