Development and characterization of zinc oxide nanorods: Short review

This work aims to conduct a brief study focused on obtaining nanostructures in the form of zinc oxide (ZnO) rods by chemical methods and to assemble structures by electron beam lithography to study transport effects. Considering the different methodologies for obtaining rods, the chemical bath deposition (CBD) technique was used, as it is low cost and delivers results consistent with those expected in a short period of time. A comparative study was carried out between the different cleanings used on the silicon substrate and how they could affect the rod growth. In addition, the formation of the structures was trained for specific powers used in the plasma etching process. The best results, regarding the nanorods being oriented vertically in relation to the substrate, were obtained for the plasma etching cleaning process at a power of 500 W for 3 min of exposure, followed by the CBD deposition technique at 90ºC for approximately two hours, both constant and mechanical.