A Silicon MEMS-Based Fiber-Optic Fabry–Perot Underwater Acoustic Sensor with a Micro-Perforated Central-Bossed Diaphragm

To address the demand for underwater acoustic detection with hydrostatic pressure resistance, this paper proposes a fiber-optic Fabry–Perot (F-P) underwater acoustic sensor based on micro-electromechanical system (MEMS) technology. According to the F-P interference principle, the diaphragm deforms under acoustic pressure, inducing variations in the F-P cavity length which modulate the interference spectrum and enable the measurement of underwater acoustic signals. A sensing diaphragm with a composite structure consisting of a central boss and a micro-hole array is designed, which improves the optical signal quality while reducing the influence of the pressure difference between the inner and outer surfaces of the diaphragm on sensor operation. MEMS fabrication, computer numerical control (CNC) machining, and laser fusion splicing technologies are employed to achieve batch fabrication of the sensing units and adhesive-free integration of the sensor. Experimental results show that the proposed sensor exhibits a flat frequency response within ±1.5 dB over the range of 1 kHz to 10 kHz, with an average signal-to-noise ratio (SNR) of 86.35 dB. The sensitivity reaches −181.79 dB re 1 rad/μPa at 10 kHz, with a maximum nonlinearity of 0.48% F.S., a repeatability error of 0.15% F.S. and a dynamic range of 100.83 dB. The proposed sensor features miniaturization, high consistency, hydrostatic pressure self-balancing capability, and immunity to electromagnetic interference, providing a solid foundation for hydrostatic-pressure-resistant underwater acoustic measurements in deep-sea environments.