Impact of ammonia flow rate on nonradiative recombination centers and localized states grown in InGaN multiquantum wells

In this article, we focus on the impact of ammonia flow rate during metal-organic chemical vapor deposition growth on the luminescence characteristics of InGaN multiple quantum wells (MQWs). By analyzing the electroluminescence spectra, temperature-dependent photoluminescence, and fluorescent microscopy images of MQW light-emitting diodes, we established the influence of ammonia flow rate on nonradiative recombination centers and localized states appearing on the surface and inside quantum wells. It was found that the ammonia flow rate affects the distribution of localized states in the bulk of quantum wells, reducing the FWHM of luminescence peaks. In addition, increasing the ammonia flow rate promotes the surface decomposition of InGaN films and decreases growth rate, weakening the quantum-confined Stark effect and improving surface quality. But it also makes injected carriers more susceptible to be captured by nonradiative recombination centers, which may reduce luminescence efficiency.

Authors

Institutions

Publication Details

Journal
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Published
2026-05-01
DOI
https://doi.org/10.1116/6.0005394
Primary Topic
GaN-based semiconductor devices and materials
Type
article
Field-Weighted Citation Impact
0.00

Funders

Controls
|||
ALL TIME
JAN
FEB
MAR
APR
MAY
JUN
JUL
AUG
SEP
OCT
article

Impact of ammonia flow rate on nonradiative recombination centers and localized states grown in InGaN multiquantum wells

Yufei Hou, Jie Yang, Ziqi Fan, Degang Zhao et al.
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
GaN-based semiconductor devices and materials
article

Impact of ammonia flow rate on nonradiative recombination centers and localized states grown in InGaN multiquantum wells

Yufei Hou, Jie Yang, Ziqi Fan, Degang Zhao, Qian Yang, Zongshun Liu, Yuheng Zhang, Feng Liang
article en

Abstract

In this article, we focus on the impact of ammonia flow rate during metal-organic chemical vapor deposition growth on the luminescence characteristics of InGaN multiple quantum wells (MQWs). By analyzing the electroluminescence spectra, temperature-dependent photoluminescence, and fluorescent microscopy images of MQW light-emitting diodes, we established the influence of ammonia flow rate on nonradiative recombination centers and localized states appearing on the surface and inside quantum wells. It was found that the ammonia flow rate affects the distribution of localized states in the bulk of quantum wells, reducing the FWHM of luminescence peaks. In addition, increasing the ammonia flow rate promotes the surface decomposition of InGaN films and decreases growth rate, weakening the quantum-confined Stark effect and improving surface quality. But it also makes injected carriers more susceptible to be captured by nonradiative recombination centers, which may reduce luminescence efficiency.

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and PhenomenaVol. 44(3)
Institute of Semiconductors (CN), University of Chinese Academy of Sciences (CN)
National Natural Science Foundation of China, Youth Innovation Promotion Association of the Chinese Academy of Sciences, National Science and Technology Major Project, National Key Research and Development Program of China
Openalex Percentile: Top 8%
GaN-based semiconductor devices and materials
AI Navigator

Ask Laika to Summarize, Analyze, and Connect papers live on the map.

Summarize Papers & Methodologies

Extract key findings, datasets, and comparative methods across publications.

Benchmark Rankings & Visual Analytics

Rank top research institutions, authors, funders, topics, and journals by Field-Weighted Citation Impact (FWCI) and paper volume with instant charts.

Connect Distant Disciplines

Bridge topological clusters on the map to find hidden collaborative intersections.